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  • Compact piezo nanopositioner
  • 500 μm three axis motion (XYZ)
  • Closed loop control
  • True flexure guided motion

Typical Applications
  • Optical fiber alignment
  • Hybrid positioning systems
  • Micromachining
  • Micromanipulation

three axis 500 micron travel piezo stage

Product Description

The Nano-3D500 is a long range, three axis (XYZ) piezo nanopositioning system constructed from aluminum. Ideally suited for optical alignment applications and high precision static positioning, the Nano-3D500 uses unique internal flexures to produce independent, isolated movement in all axes. High resolution position sensors combine with the closed loop controller to provide absolute, repeatable position measurement and long term stability. The 0.5 inch diameter center aperture provides a potentially useful optical path through the stage. A wireless 3-axis joystick controller is available as a convenience for fast, precise manual alignment without computer programming.

Technical Specifications

Ranges of motion (XYZ) 500 μm
1 nm
Resonant Frequency (X) 75 Hz ±20%
Resonant Frequency (Y) 60 Hz ±20%
Resonant Frequency (Z) 130 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0. kg
Recommended max. load (vertical)* 0.2 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-3D500 Drawing
drawing of three axis 500um piezo stage
Nano-3D500 Catalog Pages
Nano-3D500 catalog pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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