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  • Long range single axis piezo nanopositioner
  • Less than 5 nm out of plane motion
  • Low profile design
  • Closed loop control

Typical Applications
  • Surface metrology
  • Wafer scanning and alignment
  • Optical alignment

Product Description

The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS.

Technical Specifications

Range of motion (X) 200 μm
0.4 nm
Resonant Frequency 500 Hz ±20%
Resonant Frequency (100g load) 200 Hz ±20%
Stiffness 0.2 N/μm
θ roll, θ pitch (typical) ≤0.3 μrad
θ yaw (typical) ≤0.3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Al
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-LR200 Drawing

Nano-LR200 Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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