>>Nano-LR200
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Features
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Typical Applications
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Product Description |
The Nano-LR200 is designed to provide long range,
single axis translation with an absolute minimum of
out-of-axis motion. The unique design of the Nano-
LR200 produces less than 5 nm of out-of-plane motion;
measured over the entire moving platform throughout
the 200 μm range of motion. The Nano-LR200 sets the
highest level of single axis precision and positioning performance.
Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position measurement with sub-nanometer accuracy under
closed loop control. The Nano-LR200 is ideally suited
for applications that require extreme parallelism, such as
metrology, AFM and MEMS. |
Technical Specifications |
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| Range of motion (X) | 200 μm |
| Resolution |
0.4 nm |
| Resonant Frequency | 500 Hz ±20% |
| Resonant Frequency (100g load) | 200 Hz ±20% |
| Stiffness | 0.2 N/μm |
| θ roll, θ pitch (typical) | ≤0.3 μrad |
| θ yaw (typical) | ≤0.3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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