>>Nano-Theta
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Nano-Drive®
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Features
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Typical Applications
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Product Description |
The Nano-Theta is a unique piezo-actuated rotational
stage having 2 milliradians of total motion. With nanoradian
resolution, the Nano-Theta is designed for applications
in lithography, optical disk manufacturing, and
laser beam tracking or scanning. The innovative design
of the Nano-Theta incorporates a readily accessible and well-defined axis of rotation which allows a mirror
to be mounted so that it is co-planar with the axis of
rotation. Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position
measurement with nanoradian accuracy under closed
loop control. |
Technical Specifications |
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| Range of motion | 2.0 mradians |
| Resolution |
4 nradians |
| Resonant Frequency (unloaded). | 2 kHz ±20% |
| Body Material | Al or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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