>>Nano-MET Series
Additional Information
Drawing (2 Axis)
Drawing (3 Axis)
Catalog Pages
Related Products
Nano-LPQ
Nano-PDQ Series
Nano-METZ
Nano-MET10 and Nano-MET20
Accessories
SPM Accessories
Nano-Drive®
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Features
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Typical Applications
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Product Description |
The Nano-MET2 and Nano-MET3 are ultra-low
noise, high precision piezo nanopositioning systems with
picometer positioning resolution. Internal position
sensors utilizing proprietary PicoQ® technology provide
absolute, repeatable position measurement under
closed loop control. The ultra-low position noise (4
picometers/√Hz in XY and 400 femtometers/√Hz in Z)
of these piezo nanopositioning systems make them ideal for
demanding metrology applications. With a resonant
frequency of 13.5kHz, the z-axis of the Nano-MET3
offers ultra-fast response needed for demanding AFM
applications. Related products include the Nano-METZ,
Nano-MET10 and Nano-MET20 nanopositioning
systems. |
Technical Specifications |
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| Range of motion (XY) | 75 μm |
| Range of motion (Z) |
5 μm |
| Resolution (XY) | 0.15 nm |
| Resolution (Z) | 0.005 nm |
| Resonant Frequency (XY, Nano-MET2) | 1.4 kHz |
| Resonant Frequency (XY, Nano-MET3)) | 1.0 kHz |
| Resonant Frequency (Z, Nano-MET3) | 13.5 kHz |
| Recommended max. load (horizontal)* | 100 g |
| Recommended max. load (vertical)* | 100g |
| Body Material | Aluminum |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum |
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| The Nano-MET Series demonstrates less than 4 picometers/√Hz of position noise on X and Y and less than 400 femtometers/√Hz of position noise on Z. Click below to enlarge and view the data for each axis. | ||
Additional Information | |
Nano-MET2 Drawing (2 Axis) Nano-MET3 Drawing (3 Axis)  |
Nano-MET Series Catalog Pages |
Related Products |
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