>>Nano-METZ
Additinal Information
Drawing
Catalog Pages
Related Products
Nano-MET Series
Nano-MET10 & Nano-MET20
Nano-HS3M
Nano-HSZ
Nano-OP Series
Nano-MZ
Accessories
SPM Accessories
Nano-Drive®
MadPLL®
SPM-M Kit®
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Features
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Typical Applications
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Product Description |
The Nano-METZ is a compact z-axis piezo nanopositioning
system designed for high speed scanning and ultra-low
noise characteristics for demanding AFM and metrology
applications. The innovative design of the Nano-
METZ coupled with our proprietary PicoQ® sensor
technology yields a resonant frequency of 14.5kHz and a
noise floor of 400 femtometers/√Hz. The result: unparalled
speed, response and precision for the most demanding
and discerning metrology applications. Related
products include the Nano-HS3M, Nano-MET2, Nano-MET3, Nano-
MET10 and Nano-MET20 nanopositioning systems. |
Technical Specifications |
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| Range of motion | 5 μm |
| Resolution |
0.005 nm |
| Resonant Frequency | 14.5 kHz |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Aluminum or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum |
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| The Nano-METZ demonstrates less than 400 femtometers/√Hz of position noise. Click below to enlarge and view the data. | ||
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Step Response Time |
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| The step response time (rise time) of a Nano-METZ performing a 100nm step with no load is 0.25ms. Click below to enlarge and view the data. | ||
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Additional Information | |
Nano-METZ Drawing
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Nano-METZ Catalog Pages |
Related Products |
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