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Features
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Typical Applications
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Product Description |
The Nano-Mini is one of the smallest flexure guided
piezo nanopositioning stages available. Designed for optimum
performance on a small footprint, this stage uses an
innovative mini-cross section multilayer piezo ceramic
which allows for a stiff stage to translate 10 microns with
picometer precision. This unique design makes it ideal
for applications in precision metrology and microscopy. Internal position sensors utilizing proprietary PicoQ®
technology provide absolute, repeatable position measurement
with picometer accuracy under closed loop
control. Available in titanium or invar. |
Technical Specifications |
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| Range of motion | 10 μm |
| Resolution |
0.02 nm |
| Resonant Frequency | 1.5 kHz ±20% |
| Resonant Frequency (50g load) | 650 Hz ±20% |
| Stiffness | 1.0 N/μm ±20% |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤2 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.15 kg |
| Body Material | Titanium or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Mini Drawing |
Nano-Mini Catalog Pages |
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