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  • Compact tubular piezo nanopositioner
  • True flexure guided motion
  • Position sensors, closed loop control
  • Up to 70 μm motion
  • Invar and titanium construction
  • Closed loop control

Typical Applications
  • Single axis positioning
  • Surface analysis
  • Metrology

Product Description

The Nano-P Series are piezo actuated, closed loop, linear nanopositioners that incorporate a unique flexure hinge design. The flexure hinge is machined entirely from a single block of high strength titanium using an advanced electrical discharge machining process. This hinge, available for the first time on a tubular piezo nanopositioner, ensures the highest degree of repeatability and load capability. Unlike similar looking products on the market, the Nano-P Series does not have internal Belleville springs. Belleville springs are not frictionless and therefore cannot provide the high degree of repeatability of a true nanopositioner. The guiding mechanism of the Nano-P Series is a true flexure spring - eliminating mechanical friction and stiction. The Nano-P Series is constructed from invar and titanium for the best combination of thermal stability and mechanical strength, making it ideal for the most demanding nanopositioning and metrology applications. The Nano-P Series is available in three standard ranges of motion with integrated position sensors utilizing proprietary PicoQ® technology to provide absolute, repeatable position measurement with picometer accuracy under closed loop control. Custom systems available.

Noise Plots - Nano-P15

Test Data - Nano-P35

The Nano-P35 closed-loop response to a 3nm peak-to-peak square wave input signal, measured with USB digital interface.  Notice the ultra-low, sub-nanometer stability of the system over the time scale.  Similar products offered by other companies are unable to achieve such low-noise results.  The Nano-P uses a true flexure guiding mechanism and low-noise sensors to achieve high-resolution positioning. 

Technical Specifications

Range of motion (Nano-P15) 15 μm
Range of motion (Nano-P35)
35 μm
Range of motion (Nano-P70) 70 μm
Resolution (15/35/70 μm) 0.03/0.07/0.14 nm
Resonant Frequency 2.5 kHz ±20%
Recommended max. load* 0.2 kg
Body Material Invar and Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-P Series Drawing

Nano-P Series Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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