>>Nano-Align6 Series
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Features
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Typical Applications
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Product Description |
The Nano-Align6 is a six axis (X, Y, Z, θX , θY, θZ) piezo nanopositioning
system with a large center aperture. The
Nano-Align6 is ideal for alignment applications which
require three linear axes of motion (X, Y, Z) combined
with rotational motion about each axis. The large
aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6
includes internal sensors on every axis using Mad City
Labs’ proprietary PicoQ® technology for absolute position
measurement and picometer/nanoradian accuracy
under closed loop control. |
Technical Specifications |
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| Ranges of motion (Nano-Align6-100) | 100 x 100 x 100 μm x 1.1 mrad (θX) x 1.5 mrad (θY) x 5 mrad (θZ) |
| Ranges of motion (Nano-Align6-200) | 200 x 200 x 200 μm x 2.3 mrad (θX) x 3.0 mrad (θY) x 5 mrad (θZ) |
| Resolution (Nano-Align6-100) | 0.2 nm (XYZ), 2.2 nrad (θX), 3.0 nrad (θY), 10 nrad (θZ) |
| Resolution (Nano-Align6-200) |
0.4 nm (XYZ), 4.6 nrad (θX), 6.0 nrad (θY), 10 nrad (θZ) |
| Resonant Frequencies | |
| X axis (Nano-Align6-100/Nano-Align6-200) | 200/135 Hz ±20% |
| Y axis (Nano-Align6-100/Nano-Align6-200) | 110/95 Hz ±20% |
| Z axis (Nano-Align6-100/Nano-Align6-200) | 130/100 Hz ±20% |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum, Titanium or Invar |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-Align6 Series Drawing |
Nano-Align6 Series Catalog Pages |
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