>>Nano-M3Z
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Features
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Typical Applications
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Product Description |
The Nano-M3Z is a compact, three axis (Z, θX , θY)
piezo nanopositioning system constructed from Aluminum.
The compact design of the Nano-M3Z allows it to be
integrated into existing instrumentation where space
is restricted. The Nano-M3Z is ideal for demanding
applications which require precise alignment capabilities.
Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position
measurement with picometer and nanoradian accuracy
under closed loop control. A related
model, the Nano-Man5, incorporates linear X and Y motion to the capabilities of the Nano-M3Z. |
Technical Specifications |
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| Range of motion (Z) | 50 μm |
| Range of motion (θX) |
3 mradian |
| Range of motion (θY) | 3 mradian |
| Resolution (Z) | 0.1 nm |
| Resolution (θX) | 6 nradian |
| Resolution (θY) | 6 nradian |
| Resonant Frequency | 100 Hz ±20% |
| Stiffness | 1.0 N/μm |
| Recommended max. load (horizontal)* | 0.2 kg |
| Recommended max. load (vertical)* | 0.05 kg |
| Body Material | Aluminum |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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