>>Nano-Man5
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Nano-Align3 Series
Nano-M3Z
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Nano-M350
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Features
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Typical Applications
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Product Description |
The Nano-Man5 is a five axis (X, Y, Z, θX , θY) piezo nanopositioning
system with closed loop feedback control for
absolutel position measurement. The compact design of the Nano-Man5 allows it to be
easily integrated into existing instrumentation for applications
such as nanolithography and SEM. The Nano-Man5
is ideal for alignment applications which require three
linear axes of motion combined with “tip” and “tilt”
(θXθY). Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position
measurement with picometer and nanoradian accuracy
under closed loop control. The Nano-Man5 is also
available in high vacuum (non-bakeable) compatible
models. Similar to the Nano-Man5, the Nano-M350
shares the same physical dimensions but has only three
axes (XYZ) of motion. |
Technical Specifications |
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| Range of motion (X) | 50 μm |
| Range of motion (Y) |
50 μm |
| Range of motion (Z) | 25 μm |
| Range of motion (θX) | 1 mradian |
| Range of motion (θY) | 1 mradian |
| Resolution (X) | 0.1 nm |
| Resolution (Y) | 0.1 nm |
| Resolution (Z) | 0.05 nm |
| Resolution (θX) | 2 nradian |
| Resolution (θY) | 2 nradian |
| Resonant Frequency (X) | 285 Hz ±20% |
| Resonant Frequency (Y) | 235 Hz ±20% |
| Resonant Frequency (Z) | 1580 Hz ±20% |
| Recommended max. load (horizontal)* | 0.2 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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Nano-Man5 Catalog Pages |
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