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  • UHV compatible piezo nanopositioner
  • Three axis (XYZ)
  • 200 μm x 200 μm x 200 μm motion
  • Bakeable to 100° C
  • Titanium and 316SS construction
  • Closed loop PicoQ® control

Typical Applications
  • X-ray, VUV, and optical microscopy
  • Surface metrology
  • UHV atomic scale microscopy
  • Special designs - just contact us with your requirements

Product Description

The Nano-UHV200 is a three axis UHV compatible piezo nanopositioning system constructed from titanium and 316 stainless steel. Made entirely from non-magnetic UHV compatible materials, the Nano-UHV200 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 2 inch x 2 inch center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.

Technical Specifications

Range of motion (X) 200 μm
Range of motion (Y) 200 μm
Range of motion (Z) 200 μm
Resolution (XYZ) 0.4 nm
Resonant Frequency (X) 300 Hz ±20%
Resonant Frequency (Y) 150 Hz ±20%
Resonant Frequency (Z) 175 Hz ±20%
Stiffness 2 N/μm
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Titanium and 316 SS
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-UHV200 Drawing

Nano-UHV200 Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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