Nanopositioners
Vacuum Compatible Instruments
>>Nano-UHV200
Additional Information
Drawing
Catalog Pages
Related Products
Nano-UHV50
Nano-UHV100
MadMotor®-UHV
Accessories
Nano-Drive®
Custom
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Features
- UHV compatible piezo nanopositioner
- Three axis (XYZ)
- 200 μm x 200 μm x 200 μm motion
- Bakeable to 100° C
- Titanium and 316SS construction
- Closed loop PicoQ® control
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Typical Applications
- X-ray, VUV, and optical microscopy
- Surface metrology
- UHV atomic scale microscopy
- Special designs - just contact us with your requirements
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Product Description |
The Nano-UHV200 is a three axis UHV compatible piezo
nanopositioning system constructed from titanium and
316 stainless steel. Made entirely from non-magnetic
UHV compatible materials, the Nano-UHV200 is
bakeable to 100°C for vacuum applications in the 10-10
Torr range. A 2 inch x 2 inch center aperture provides
an optical pathway or access for sample holders.
Internal position sensors utilizing proprietary PicoQ®
technology provide absolute, repeatable position measurement
with picometer accuracy. Cable lengths and
connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical
feedthrough flanges - compatibility with other types of flanges may be requested.
Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.
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Technical Specifications |
Range of motion (X) |
200 μm |
Range of motion (Y) |
200 μm |
Range of motion (Z) |
200 μm |
Resolution (XYZ) |
0.4 nm |
Resonant Frequency (X) |
300 Hz ±20% |
Resonant Frequency (Y) |
150 Hz ±20% |
Resonant Frequency (Z) |
175 Hz ±20% |
Stiffness |
2 N/μm |
θ roll, θ pitch (typical) |
≤1 μrad |
θ yaw (typical) |
≤3 μrad |
Recommended max. load (horizontal)* |
0.5 kg |
Recommended max. load (vertical)* |
0.2 kg |
Body Material |
Titanium and 316 SS |
Controller |
Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
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