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  • UHV compatible piezo nanopositioner
  • Two axis (XY)
  • 50 μm x 50 μm ranges of motion
  • Bakeable to 100° C
  • Titanium or invar construction
  • Closed loop PicoQ® control

Typical Applications
  • X-ray, VUV, and optical microscopy
  • Surface metrology
  • UHV atomic scale microscopy
  • Special designs - just contact us with your requirements

Product Description

The Nano-UHV50 is a two axis UHV compatible piezo nanopositioning system constructed from titanium or invar. Made entirely from UHV compatible materials, the Nano-UHV50 is bakeable to 100°C for vacuum applications in the 10-10 Torr range. A 1 inch (25mm) center aperture provides an optical pathway or access for sample holders. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy. Cable lengths and connectors are customized for the actual installation. Connector wiring is compatible with Accu-Glass Products electrical feedthrough flanges - compatibility with other types of flanges may be requested.

Note: Customized UHV stages are always welcome - just email or call to discuss your special requirements.


Technical Specifications

Range of motion (X) 50 μm
Range of motion (Y) 50 μm
Resolution (XY)
0.1 nm
Resonant Frequency (X) 500 Hz ±20%
Resonant Frequency (Y) 250 Hz ±20%
Stiffness 0.5 N/μm
θ roll, θ pitch (typical) ≤1 μrad
θ yaw (typical) ≤3 μrad
Recommended max. load (horizontal)* 0.5 kg
Recommended max. load (vertical)* 0.2 kg
Body Material Invar or Titanium
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-UHV50 Drawing

Nano-UHV50 Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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