>>Nano-M250
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Features
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Typical Applications
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Product Description |
The Nano-M250 is a compact, two axis piezo nanopositioning
system constructed from aluminum. The small
dimensions of the Nano-M250 allow it to be easily integrated
into existing instrumentation for applications such
as nanolithography and SEM. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable
position measurement with picometer accuracy under
closed loop control. The Nano-M250 is also available in
high vacuum and ultra high vacuum compatible models. Custom modifications, including range
of motion, are available. Contact your local sales office
for more information. |
Technical Specifications |
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| Range of motion (XY) | 50 μm x 50 μm |
| Resolution |
0.1 nm |
| Resonant Frequency (X) | 370 Hz ±20% |
| Resonant Frequency (Y) | 300 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Aluminum |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
Nano-M250 Drawing |
Nano-M250 Catalog Pages |
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