>>Nano-M350
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Features
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Typical Applications
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Product Description |
The Nano-M350 is a compact three axis (X, Y, Z)
piezo nanopositioning system constructed from aluminum.
The XY travel range is 50 μm and 20 μm in the Z
axis under closed loop control. The compact design
of the Nano-M350 allows it to be easily integrated
into existing instrumentation for applications such
as nanolithography, SEM. Internal position sensors
utilizing proprietary PicoQ®technology provide absolute,
repeatable position measurement with picometer
accuracy under closed loop control. The Nano-M350
has been designed for high speed performance in the
Z-axis while maintaining high precision motion and is
also available in high vacuum (non-bakeable) compatible
models. |
Technical Specifications |
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| Range of motion (X) | 50 μm |
| Range of motion (Y) |
50 μm |
| Range of motion (Z) | 20 μm |
| Resolution (20/50 μm) | 0.04/0.1 nm |
| Resonant Frequency (X) | 285 Hz ±20% |
| Resonant Frequency (Y) | 285 Hz ±20% |
| Resonant Frequency (Z) | 1580 Hz ±20% |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Auminum |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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Nano-M350 Catalog Pages |
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