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  • Compact piezo nanopositioner
  • Low profile: 0.76"
  • Closed loop control
  • Custom travel ranges available

Typical Applications
  • High resolution Z-axis alignment
  • AFM
  • Metrology

Product Description

The Nano-MZ is a compact Z-axis piezo nanopositioning system designed to be easily integrated into existing instrumentation where space is restricted. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. A related model, the Nano-M3Z, includes additional “tip” and “tilt” motions (θXY) to the linear motion in the Z-axis. The Nano-MZ can be customized for longer ranges of motion (up to 100 microns) and a center aperture can also be incorporated for transmission of light..

Technical Specifications

Range of motion (Z) 25 μm
0.05 nm
Resonant Frequency 1300 Hz ±20%
Stiffness 1.0 N/μm
Recommended max. load (horizontal)* 0.5 kg
Body Material Aluminum
Controller Nano-Drive®
* Larger load requirements should be discussed with our engineering staff.

Additional Information

Nano-MZ Drawing

Nano-MZ Catalog Pages

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mclgen@madcitylabs.com       phone: 608.298.0855       fax: 608.298.9525

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