Nanopositioners
>>Nano-MZ
Additional Information
Drawing 
Catalog Pages 
Related Products
Nano-F Series
Nano-ZS Series
Nano-ZL Series
Nano-P Series
Nano-M3Z
Nano-HSZ
Accessories
SPM Accessories
Nano-Drive®
Questions?
E-Mail Us |
Features
- Compact piezo nanopositioner
- Low profile: 0.76"
- Closed loop control
- Custom travel ranges available
|
Typical Applications
- High resolution Z-axis alignment
- AFM
- Metrology
|

Product Description |
The Nano-MZ is a compact Z-axis piezo nanopositioning
system designed to be easily
integrated into existing instrumentation where space is
restricted. Internal position sensors utilizing proprietary
PicoQ® technology provide absolute, repeatable position
measurement with picometer accuracy under closed loop
control. A related model, the Nano-M3Z, includes
additional “tip” and “tilt” motions (θX ,θY) to the linear
motion in the Z-axis. The Nano-MZ can be customized for longer ranges of motion (up to 100 microns) and a center aperture can
also be incorporated for transmission of light..
 |
Technical Specifications |
Range of motion (Z) |
25 μm |
Resolution
|
0.05 nm |
Resonant Frequency |
1300 Hz ±20% |
Stiffness |
1.0 N/μm |
Recommended max. load (horizontal)* |
0.5 kg |
Body Material |
Aluminum |
Controller |
Nano-Drive® |
* Larger load requirements should be discussed with our engineering staff. |
|