>>Nano-HSZ
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Features
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Typical Applications
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Product Description |
The Nano-HSZ is a high speed single axis (Z-axis) precision
piezo nanopositioning system. Internal position sensors
utilizing proprietary PicoQ® technology provide absolute,
repeatable position measurement with picometer accuracy
under closed loop control. The Nano-HSZ offers a compact
footprint, ultra low noise characteristics, and a resonant
frequency greater than 7 kHz. These characteristics
make it ideal for applications that require noise floors
less than 10 picometers and/or high speed performance.
With the step response time of the Nano-HSZ set to
less than 1 millisecond for extremely high speed applications,
scan frequencies up to 500Hz can be achieved. |
Nano-HSZ Position Noise Spectrum |
Technical Specifications |
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| Range of motion (Z) | 10 μm |
| Resolution |
0.01 nm |
| Resonant Frequency | 7.5 kHz ±20% |
| Scanning Speed (full amplitude) | up to 500 Hz |
| Stiffness | 12 N/μm |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Additional Information | |
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