>>Nano-HS Series
Additinal Information
Drawing (HS2)
Drawing (HS3)
Catalog Pages
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Nano-Drive®
MadPLL®
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Features
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Typical Applications
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Product Description |
The Nano-HS Series is a high speed, multi-axis, precision
piezo nanopositioning system with picometer positioning resolution.
Offering maximum versatility, the Nano-HS can
be configured to provide XY or XYZ motion. Internal
position sensors utilizing proprietary PicoQ® technology
provide absolute, repeatable position measurement under
closed loop control. The compact footprint, ultra-low
noise characteristics, and a Z-axis resonant frequency
of 5kHz make it ideal for metrology applications that
require noise floors less than 10 picometers and/or high
speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see the Nano-HS3M. |
Technical Specifications |
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| Range of motion (XYZ) | 10 μm |
| Resolution |
0.01 nm |
| XY (HS2) Resonant Frequency | 1.5 kHz ±20% |
| XY (HS3) Resonant Frequency | 1.0 kHz ±20% |
| Z (HS3) Resonant Frequency | 5.0 kHz ±20% |
| Scanning Speed | up to 300 Hz |
| Stiffness (Z-axis) | 8 N/μm |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Al, Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum |
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| The Nano-HS Series demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. | ||
AFM Verification of PicoQ® Sensor Technology PerformancePosition noise of a piezo nanopositioning system is the ultimate limit of the system's measurement resolution. Many applications involving sub-nanometer measurements, such as atomic force microscopy (AFM), would not be possible without low noise nanopositioning systems. The tests below employ a Nano-HS3 for XYZ probe motion and demonstrate the ultra-low position noise and high accuracy of nanopositioning systems with PicoQ® sensor technology. Some companies claim to sell systems with sub-nanometer resolution, but they do not have data from external metrology tests to support their claims. All Mad City Labs piezo nanopositioning products are rigorously tested before shipment. These tests involve a series of measurements designed to fully characterize the performance of the nanopositioning system with a realistic environment and testing conditions that match the application. Available metrology tools include NIST-traceable interferometers, high resolution AFM, and a high resolution position noise analyzer, designed specifically for nanopositioning characterization. The links below lead to in-depth descriptions of some of our AFM measurements.
Measurements taken with an AFM show that piezo nanopositioners with PicoQ® sensor technology have sufficiently low position noise to accurately resolve single atomic layer size steps, 312 pm. AFM Demonstrations: Sub-Nanometer Motion 100 and 450 micron range nanopositioners with PicoQ sensor technology perform 860 picometer steps, 1 nanometer sine wave, and repeated 95 picometer steps, externally measured by AFM. AFM Demonstrations: Measuring Surface Roughness AFM is used to externally verify that the position noise of a piezo nanopositioning system with PicoQ® sensor technology is less than the surface roughness of a Si (111) sample, 60 pm RMS. |
Additional Information | |
Nano-HS2 Drawing Nano-HS3 Drawing  |
Nano-HS Series Catalog Pages |
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