>>Nano-HS3M
Additinal Information
Drawing
Catalog Pages
Related Products
Nano-MET Series
Nano-MET10 & Nano-MET20
Nano-HS Series
Nano-M350
Nano-METZ
MMP Series
Accessories
SPM Accessories
Nano-Drive®
MadPLL®
SPM-M Kit®
Questions?
E-Mail Us
  |
Features
 |
Typical Applications
|
Product Description |
The Nano-HS3M is a high speed, XYZ precision
piezo nanopositioning system with picometer positioning
resolution. Offering maximum versatility, the Nano-
HS3M is designed for demanding metrology applications.
Internal position sensors utilizing proprietary PicoQ®technology provide absolute, repeatable position
measurement under closed loop control. The compact
footprint, ultra-low noise characteristics, and a Z-axis
resonant frequency of 13.5kHz make it ideal for metrology
applications that require picometer noise floors and
high speed performance. |
Technical Specifications |
|
| Range of motion (XY) | 10 μm |
| Range of motion (Z) | 5 μm |
| Resolution |
0.01 nm |
| Resonant Frequency (X) | 1.6 kHz |
| Resonant Frequency (Y) | 1.5 kHz |
| Resonant Frequency (Z) | 13.5 kHz |
| Recommended max. load (horizontal)* | 0.1 kg |
| Recommended max. load (vertical)* | 0.1 kg |
| Body Material | Aluminum or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
Position Noise Spectrum |
||
| The Nano-HS3M demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis. | ||
AFM Verification of PicoQ® Sensor Technology PerformancePosition noise of a piezo nanopositioning system is the ultimate limit of the system's measurement resolution. Many applications involving sub-nanometer measurements, such as atomic force microscopy (AFM), would not be possible without low noise piezo nanopositioning systems. The tests below employ a Nano-HS3 for XYZ probe motion and demonstrate the ultra-low position noise and high accuracy of nanopositioning systems with PicoQ® sensor technology. Some companies claim to sell systems with sub-nanometer resolution, but they do not have data from external metrology tests to support their claims. All Mad City Labs piezo nanopositioning products are rigorously tested before shipment. These tests involve a series of measurements designed to fully characterize the performance of the nanopositioning system with a realistic environment and testing conditions that match the application. Available metrology tools include NIST-traceable interferometers, high resolution AFM, and a high resolution position noise analyzer, designed specifically for nanopositioning characterization. The links below lead to in-depth descriptions of some of our AFM measurements.
Measurements taken with an AFM show that piezo nanopositioners with PicoQ® sensor technology have sufficiently low position noise to accurately resolve single atomic layer size steps, 312 pm. AFM Demonstrations: Sub-Nanometer Motion 100 and 450 micron range piezo nanopositioners with PicoQ sensor technology perform 860 picometer steps, 1 nanometer sine wave, and repeated 95 picometer steps, externally measured by AFM. AFM Demonstrations: Measuring Surface Roughness AFM is used to externally verify that the position noise of a piezo nanopositioning system with PicoQ® sensor technology is less than the surface roughness of a Si (111) sample, 60 pm RMS. |
Additional Information | |
Nano-HS3M Drawing
|
Nano-HS3M Catalog Pages |
Related Products |
Copyright © 2024